PRODUCTS

HPSI-Type SiC Substrate

Synlight constantly pursues higher crystal quality and processing quality to meet customer needs, and can currently supply 4-6 inch N type products in bulk supply.

产品描述

Grade	Preference Grade+	Production Grade	Research Grade	Dummy Grade
Diameter	150.0 mm + 0.0/-0.5mm
Thickness	500.0μm ±25.0 μm / 350.0 μm ±25.0 μm
Surface Orientation	<0001>± 0.2°
TTV	≤ 15 μm			≤ 20 μm
BOW	≤ 40 μm			≤ 60 μm
Warp	≤ 60 μm
Surface Roughness	CMP Si Surface Ra<0.3 nm(10 μmx10 μm)			CMP Si Surface Ra<0.5 nm(10 μmx10 μm)