PRODUCTS

N-Type SiC Substrate

Synlight constantly pursues higher crystal quality and processing quality to meet customer needs, and can currently supply 4-8 inch N type products in bulk supply.

产品描述

Parameter	Unit	Specification Value			Remark
Grade		Production+ Grade	Research Grade	Dummy Grade
Diameter	mm	150+0/-0.2		150+0/-0.5
Thickness	μm	500±15		500±25
Polytype		4H-SiC
Surface Orientation		<0001>±0.2°		<0001>±0.5°
TTV	μm	≤7	≤8	≤15
BOW	μm	0±15	0±20	0±30
Warp	μm	≤25	≤30	≤45
Surface Roughness	nm	C-face:mirror polished,Ra<3.0			AFM@5μm*5μm
Surface Roughness	nm	Si-face: CMP,Ra<0.2			AFM@5μm*5μm