PRODUCTS

Low-resistivity

Synlight constantly pursues higher crystal quality and processing quality to meet customer needs, and can currently supply 6 inch、8 inch、12 inch N type products in bulk supply.

产品描述

Parameter	Unit	Specification Value				Remark
Grade	-	Production Grade For MOS1	Production Grad For MOS2	Production GradeFor SBD	Dummy Grade
Diameter	mm	200±0.2			200±0.5
Thickness	μm	350±25\500±25			350 ± 40\500 ± 40
Polytype	-	4H-SIC
Surface Orientation	-
TTV	μm	≤5	≤6	≤8	≤10
Bow	μm	0±15	0±18	0±20	0±30
Warp	μm	≤25	≤28	≤30	≤60
Surface Roughness	nm	C-face: mirror polished , Ra<3.0 Si-face: CMP , Ra<0.2				AFM@10μm*10μm